MEMS Flow Sensors
D6F series
Series Catalog
Faster and more accurate than ever before
MEMS flow sensor : the ideal means for mass flow measurement
Omron ow sensor
so precise
even the ap of a butterys
wings will not be missed.Realizing a highly accurate flow measurement,
Omrons MEMS flow sensor accurately detects minute airflow so mmuuchch a ass a a si singnglele f flalapp of of a aa b bubuutttttteeerrrfffllyyysss wi wi wwiingnnngsn s..
A gas flow sensor capable of measuring mass flow independent ooff tteempmpeerraattururee a anndd pprprreeesssssursuurrereee....
D6F-A6
D6F-W
Mass Flow Measurement
Principles of MEMS Flow
D6F Series
There are two balloons; each having different volumes.
Q1
No airow
But these balloons have the same mass. Why is that?
Temperature distribution
The volume increases/decreases according to the pressure and
Heater
A
temperature changes. The mass, on the other hand, Thermopile A Thermopile B
remains constant regardless of the environmental changes.
The mass flow measurement allows measurement performance
that is not affected by the changes in the environment.
Cross-sectional view of ow sensor chip
During the absence of airow, the temperature
Q2 Why is mass ofl w measurement required?
distribution around the heater is symmetrical.
When there is airow, the temperature of the
An accurate measurement of the flow is required especially for
A upwind side cools down and the temperature
combustion control. Omrons flow sensor enables measuring the of the downwind side warms up, disrupting the
symmetry of the temperature distribution.
gas flow based on the mass flow measurement.
2